Patent Assignment Details
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| Reel/Frame: | 013018/0581 | |
| Pages: | 2 |
| | Recorded: | 06/21/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/05/2005
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Application #:
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10127765
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Filing Dt:
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04/23/2002
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Publication #:
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Pub Dt:
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11/14/2002
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Title:
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EXPOSURE METHOD, PLANE ALIGNMENT METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
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Assignee
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| 3-30-2 SHIMOMARUKO, OHTA-KU |
| TOKYO,, JAPAN |
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Correspondence name and address
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FITZPATRICK, CELLA
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HARPER & SCINTO
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30 ROCKEFELLER PLAZA
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NEW YORK, NEW YORK 10112-3801
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