Patent Assignment Details
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| Reel/Frame: | 013024/0362 | |
| Pages: | 4 |
| | Recorded: | 06/24/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10104109
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Filing Dt:
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03/22/2002
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Publication #:
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Pub Dt:
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12/26/2002
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Title:
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METHOD FOR VAPOR PHASE ETCHING OF SILICON
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Assignee
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| SUITE 103 |
| 3910 FREEDOM CIRCLE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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REFLECTIVITY, INC.
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GREGORY R. MUIR
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3910 FREEDOM CIRCLE, SUITE 103
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SANTA CLARA, CA 95054
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