Patent Assignment Details
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| Reel/Frame: | 013032/0652 | |
| Pages: | 3 |
| | Recorded: | 06/19/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/13/2004
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Application #:
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10176118
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Filing Dt:
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06/19/2002
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Title:
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METHOD FOR IN-SITU FILM THICKNESS MEASUREMENT AND ITS USE FOR IN-SITU CONTROL OF DEPOSITED FILM THICKNESS
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Assignee
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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DELIO & PETERSON, LLC
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KELLY M. REYNOLDS
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121 WHITNEY AVENUE
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NEW HAVEN, CT 06510-1241
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