Patent Assignment Details
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Reel/Frame: | 013046/0376 | |
| Pages: | 4 |
| | Recorded: | 06/21/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/11/2006
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Application #:
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10178444
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Filing Dt:
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06/21/2002
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Publication #:
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Pub Dt:
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12/26/2002
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Title:
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PLASMA TREATING APPARATUS, PLASMA TREATING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignee
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1006, KADOMA, KADOMA-SHI |
OSAKA, JAPAN |
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Correspondence name and address
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MICHAEL W. GARVEY
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526 SUPERIOR AVENUE EAST SUITE 1200
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CLEVELAND OH 44114-1484
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