Patent Assignment Details
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| Reel/Frame: | 013062/0771 | |
| Pages: | 3 |
| | Recorded: | 09/06/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10190243
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Filing Dt:
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07/03/2002
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Publication #:
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Pub Dt:
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01/08/2004
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Title:
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Method and apparatus for endpoint detection
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Assignee
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| 870 NORTH COMMONS DRIVE |
| AURORA, ILLINOIS 60504 |
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Correspondence name and address
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CABOT MICROELECTRONICS CORPORATION
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PHYLLIS T. TURNER-BRIM, ESQ.
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870 NORTH COMMONS DR.
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AURORA, IL 60504
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