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Patent Assignment Details
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Reel/Frame:013068/0052   Pages: 2
Recorded: 07/08/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/07/2005
Application #:
10125439
Filing Dt:
04/19/2002
Publication #:
Pub Dt:
10/31/2002
Title:
CHARGED PARTICLE BEAM EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND CHARGED PARTICLE BEAM APPLIED APPARATUS
Assignors
1
Exec Dt:
05/20/2002
2
Exec Dt:
05/29/2002
3
Exec Dt:
06/06/2002
Assignees
1
OHTA-KU
3-30-2 SHIMOMARUKO
TOKYO, JAPAN
2
CHIYODA-KU
6, KANDA SURUGADAI 4-CHOME
TOKYO, JAPAN
3
NERIMA-KU
32-1, ASAHI-CHO 1-CHOME
TOKYO, JAPAN
Correspondence name and address
FITZPATRICK, CELLA, HARPER & SCINTO
STEVEN E. WARNER
30 ROCKEFELLER PLAZA
NEW YORK, NEW YORK 10112-3801

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