Patent Assignment Details
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Reel/Frame: | 013078/0521 | |
| Pages: | 9 |
| | Recorded: | 07/09/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/12/2003
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Application #:
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10074277
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Filing Dt:
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02/11/2002
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Title:
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USE OF INTEGRATED POLYGEN DEPOSITION AND RTP FOR MICROELECTROMECHANICAL SYSTEMS
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Assignee
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PATENT COUNSEL, M/S 2061 |
P.O. BOX 450-A |
SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC
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P.O. BOX 450-A
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PATENT COUNSEL, M/S 2061
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SANTA CLARA, CA 95052
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