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Total properties:
12
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Patent #:
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Issue Dt:
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02/27/1990
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Application #:
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07269017
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Filing Dt:
|
11/09/1988
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Title:
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SUPPORT FOR SLICE-SHAPED ARTICLES AND DEVICE FOR ETCHING SILICON WAFERS WITH SUCH A SUPPORT
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Patent #:
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Issue Dt:
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05/07/1996
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Application #:
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08194325
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Filing Dt:
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02/08/1994
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Title:
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SUPPORT FOR DISK-SHAPED ARTICLES
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|
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Patent #:
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Issue Dt:
|
06/09/1998
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Application #:
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08632457
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Filing Dt:
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04/19/1996
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Title:
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GRIPPER FOR DISK-SHAPED ARTICLES
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Patent #:
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Issue Dt:
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04/27/1999
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Application #:
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08971754
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Filing Dt:
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11/17/1997
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Title:
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SUPPORT FOR WAFER-LIKE OBJECTS
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Patent #:
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Issue Dt:
|
02/27/2001
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Application #:
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09079455
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Filing Dt:
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05/15/1998
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Title:
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ARRANGEMENT FOR TREATMENT OF WAFER-SHAPED ARTICLES, PARTICULARLY SILICON WAFERS
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Patent #:
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Issue Dt:
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05/18/1999
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Application #:
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09080236
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Filing Dt:
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05/18/1998
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Title:
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NRRANGEMENT FOR TREATMENT OF WAFER-SHAPED ARTICLES, PARTICULARLY SILICON WAFERS
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Patent #:
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Issue Dt:
|
08/03/1999
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Application #:
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09093187
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Filing Dt:
|
06/08/1998
|
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Title:
|
GRIPPER FOR WAFER-SHAPED ARTICLES
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|
|
|
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Patent #:
|
|
Issue Dt:
|
05/02/2000
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Application #:
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09098507
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Filing Dt:
|
06/17/1998
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Title:
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ROTARY CHUCK INCLUDING PINS FOR LIFTING WAFERS
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|
|
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Patent #:
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|
Issue Dt:
|
05/02/2000
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Application #:
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09156598
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Filing Dt:
|
09/18/1998
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Title:
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APPARATUS FOR PREVENTING DRIPPING FROM CONDUIT OPENINGS
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|
|
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Patent #:
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|
Issue Dt:
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12/19/2000
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Application #:
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09248094
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Filing Dt:
|
02/11/1999
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Title:
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PROCESS FOR WET ETCHING OF SEMICONDUCTOR WAFERS
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|
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Patent #:
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|
Issue Dt:
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11/13/2001
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Application #:
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09537705
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Filing Dt:
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03/30/2000
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Title:
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PROCESS AND DEVICE FOR HANDLING DISK-LIKE OBJECTS, ESPECIALLY SILICON WAFERS
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|
|
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Patent #:
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Issue Dt:
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02/20/2007
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Application #:
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10143904
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Filing Dt:
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05/14/2002
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Publication #:
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Pub Dt:
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05/08/2003
| | | | |
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Title:
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PROCESS FOR PLANARIZING SUBSTRATES OF SEMICONDUCTOR TECHNOLOGY
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