Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 013126/0447 | |
| Pages: | 25 |
| | Recorded: | 09/26/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/08/2005
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Application #:
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10159794
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Filing Dt:
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05/30/2002
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Publication #:
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Pub Dt:
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02/20/2003
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Title:
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SEMICONDUCTOR DEVICE FABRICATION CHAMBER CLEANING METHOD AND APPARATUS WITH RECIRCULATION OF CLEANING GAS
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Assignee
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| PATENT DEPARTMENT |
| P.O. BOX 450A, M/S #2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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JAMES C. WILSON
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P.O. BOX 450A, M/S 2061
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PATENT DEPT.
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SANTA CLARA, CA 95052
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