Patent Assignment Details
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| Reel/Frame: | 013163/0838 | |
| Pages: | 5 |
| | Recorded: | 08/05/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/16/2004
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Application #:
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10134333
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Filing Dt:
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04/29/2002
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Publication #:
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Pub Dt:
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12/05/2002
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Title:
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METHOD AND APPARATUS FOR CHARACTERIZATION OF ULTRATHIN SILICON OXIDE FILMS USING MIRROR-ENHANCED POLARIZED REFLECTANCE FOURIER TRANSFORM INFRARED SPECTROSCOPY
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Assignee
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| 506 SOUTH WRIGHT STREET |
| 352 ADMINISTRATION BUILDING |
| URBANA, ILLINOIS 61801 |
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Correspondence name and address
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MARSHALL, GERSTEIN & BORUN
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JAMES J. NAPOLI, PH.D.
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233 S. WACKER DRIVE, SUITE 6300
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SEARS TOWER
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CHICAGO, ILLINOIS 60606-6357
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