Patent Assignment Details
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| Reel/Frame: | 013178/0164 | |
| Pages: | 3 |
| | Recorded: | 08/02/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/06/2005
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Application #:
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10211453
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Filing Dt:
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08/02/2002
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Publication #:
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Pub Dt:
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02/05/2004
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Title:
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UNDOPED AND FLUORINATED AMORPHOUS CARBON FILM AS PATTERN MASK FOR METAL ETCH
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Assignee
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT W. MULCAHY
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P.O. BOX 450A, M/S 2061
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PATENT COUNSEL, LEGAL AFFAIRS DEPT.
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SANTA CLARA, CA 95052
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