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Total properties:
11
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Patent #:
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Issue Dt:
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02/06/2001
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Application #:
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09195887
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Filing Dt:
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11/19/1998
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Title:
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ELECTROSTATIC DEVICE FOR CORRECTING CHROMATIC ABERRATION IN A PARTICLE-OPTICAL APPARATUS
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Patent #:
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Issue Dt:
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02/06/2001
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Application #:
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09205441
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Filing Dt:
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12/04/1998
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Title:
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ENVIRONMENTAL SEM WITH A MULTIPLE FIELDS FOR IMPROVED SECONDARY ELECTRON DETECTION
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Patent #:
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Issue Dt:
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04/02/2002
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Application #:
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09205526
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Filing Dt:
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12/03/1998
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Title:
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ENVIRONMENTAL SEM WITH A MAGNETIC FIELD FOR IMPROVED SECONDARY ELECTRON DIRECTION
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09209969
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Filing Dt:
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12/10/1998
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Title:
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CORRECTION DEVICE FOR CORRECTING THE SPHERICAL ABERRATION IN PARTICLE-OPTICAL APPARATUS
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Patent #:
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Issue Dt:
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06/12/2001
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Application #:
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09217220
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Filing Dt:
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12/21/1998
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Title:
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CORRECTION DEVICE FOR CORRECTING CHROMATIC ABERRATION IN PARTICLE-OPTICAL APPARATUS
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09367176
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Filing Dt:
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08/09/1999
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Title:
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CORRECTION DEVICE FOR CORRECTING THE LENS DEFECTS IN PARTICLE-OPTICAL APPARATUS
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09464008
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Filing Dt:
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12/15/1999
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Title:
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PARTICLE-OPTICAL APPARATUS INVOLVING DETECTION OF AUGER ELECTRONS.
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09473537
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Filing Dt:
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12/28/1999
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Title:
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SEM FOR TRANSMISSION OPERATION WITH A LOCATION-SENSTIVE DETECTOR
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Patent #:
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Issue Dt:
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02/17/2004
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Application #:
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09596217
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Filing Dt:
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06/19/2000
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Title:
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PARTICLE-OPTICAL APPARATUS INCLUDING A PARTICLE SOURCE THAT CAN BE SWITCHED BETWEEN HIGH BRIGHTNESS AND LARGE BEAM CURRENT
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09745940
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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08/30/2001
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Title:
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MULTI-BEAM LITHOGRAPHY APPARATUS WITH MUTUALLY DIFFERENT BEAM LIMITING APERTURES
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09767570
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Filing Dt:
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01/23/2001
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Publication #:
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Pub Dt:
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08/09/2001
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Title:
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OBJECT CARRIER FOR A PARTICLE-OPTICAL APPARATUS
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