Patent Assignment Details
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| Reel/Frame: | 013241/0897 | |
| Pages: | 2 |
| | Recorded: | 08/23/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10226961
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Filing Dt:
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08/23/2002
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Publication #:
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Pub Dt:
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03/06/2003
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Title:
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Substrate processing system for performing exposure process in gas atmosphere
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Assignee
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| 7-1 SHIBA 5 CHOME MINATO-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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HUTCHINS, WHEELER & DITMAR
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DONALD W. MUIRHEAD
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101 FEDERAL STREET
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BOSTON, MA 02110
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