Patent Assignment Details
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| Reel/Frame: | 013246/0652 | |
| Pages: | 5 |
| | Recorded: | 09/03/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/05/2002
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Application #:
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09628471
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Filing Dt:
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07/31/2000
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Title:
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IN-SITU METHOD AND APPARATUS FOR END POINT DETECTION IN CHEMICAL MECHANICAL POLISHING
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Assignee
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| 77 MASSACHUSETTS AVENUE |
| CAMBRIDGE, MASSACHUSETTS 02139 |
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Correspondence name and address
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DORSEY & WHITNEY LLP
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MARIA S. SWIATEK
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SUITE 3400
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FOUR EMBARCADERO CENTER
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SAN FRANCISCO, CA 94111-4187
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