Patent Assignment Details
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| Reel/Frame: | 013256/0046 | |
| Pages: | 4 |
| | Recorded: | 08/29/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10231587
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Filing Dt:
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08/29/2002
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Publication #:
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Pub Dt:
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03/06/2003
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Title:
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Methods and apparatus for correcting the proximity effect in a charged-particle-beam microlithography system and devices manufactured from the same
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Assignee
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| 2-3 MARUNOUCHI 3-CHOME |
| CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN LLP
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DONALD L. STEPHENS JR.
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ONE WORLD TRADE CENTER, STE. 1600
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121 SW. SALMON ST.
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PORTLAND, OR 97204-2988
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