Patent Assignment Details
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| Reel/Frame: | 013278/0034 | |
| Pages: | 2 |
| | Recorded: | 09/10/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/08/2005
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Application #:
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10208818
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Filing Dt:
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08/01/2002
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Publication #:
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Pub Dt:
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03/27/2003
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Title:
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WAFER INSPECTION METHOD OF CHARGING WAFER WITH A CHARGED PARTICLE BEAM THEN MEASURING ELECTRIC PROPERTIES THEREOF AND INSPECTION DEVICE BASED THEREON
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Assignee
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| 6, KANDA SURUGADAI 4-CHOME CHIYODA-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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REED SMITH LLP
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STANLEY P. FISHER
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3100 FAIRVIEW PARK DR.
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SUITE 1400
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FALLS CHURCH, VA 22042
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