Patent Assignment Details
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| Reel/Frame: | 013340/0523 | |
| Pages: | 5 |
| | Recorded: | 09/27/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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10256141
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Filing Dt:
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09/27/2002
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Publication #:
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Pub Dt:
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05/29/2003
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Title:
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CHEMICALLY AMPLIFIED RESIST COMPOSITIONS AND PATTERNING PROCESS
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Assignees
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| 6-1 OTEMACHI, 2-CHOME |
| CHIYODA-KU, TOKYO, JAPAN |
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| 10006, OAZA KADOMA |
| KADOMA-SHI, OSAKA, JAPAN |
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| 5253, OAZA OKIUBE |
| UBE-SHI, YAMAGUCHI-KEN, JAPAN |
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Correspondence name and address
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BIRCH, STEWART, KOLASCH & BIRCH, LLP
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GERALD M. MURPHY
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P.O. BOX 747
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FALLS CHURCH, VA 22040-0747
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