Patent Assignment Details
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| Reel/Frame: | 013344/0103 | |
| Pages: | 2 |
| | Recorded: | 10/01/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10195359
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Filing Dt:
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07/16/2002
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Publication #:
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Pub Dt:
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01/23/2003
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Title:
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Substrate processing apparatus, substrate processing method, and exposure apparatus
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Assignee
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| 3-30-2, SHIMOMARUKO |
| OHTA-KU, TOKYO, JAPAN |
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Correspondence name and address
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FITZPATRICK, CELLA, HARPER& SCINTO
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STEVEN E. WARNER
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30 ROCKEFELLER PLAZA
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NEW YORK, NY 10112-3801
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