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Reel/Frame:013349/0638   Pages: 3
Recorded: 09/27/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
02/24/2004
Application #:
10260821
Filing Dt:
09/27/2002
Title:
SYSTEM FOR THE IMPROVED HANDLING OF WAFERS WITHIN A PROCESS TOOL
Assignors
1
Exec Dt:
09/06/2002
2
Exec Dt:
09/06/2002
3
Exec Dt:
09/12/2002
Assignee
1
3440 EAST UNIVERSITY DRIVE
PHOENIX, ARIZONA 85283
Correspondence name and address
KNOBBE MARTENS OLSON, ET AL.
ADEEL S. AKHTAR
2040 MAIN STREET
14TH FLOOR
IRVINE, CA 92614

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