Patent Assignment Details
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| Reel/Frame: | 013354/0274 | |
| Pages: | 2 |
| | Recorded: | 09/30/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/08/2006
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Application #:
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10261249
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Filing Dt:
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09/30/2002
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Publication #:
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Pub Dt:
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04/01/2004
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Title:
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193NM RESIST WITH IMPROVED POST-EXPOSURE PROPERTIES
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Assignee
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| 2-11-24, TSUKIJI, CHIO-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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INTERNATIONAL BUSINESS MACHINES CORP.
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STEVEN CAPELLA
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2070 ROUTE 52
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HOPEWELL JUNCTION, NY 10504
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