Patent Assignment Details
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| Reel/Frame: | 013355/0996 | |
| Pages: | 3 |
| | Recorded: | 09/30/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/27/2004
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Application #:
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10261907
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Filing Dt:
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09/30/2002
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Publication #:
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Pub Dt:
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04/01/2004
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Title:
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ADVANCED RAPID THERMAL PROCESSING (RTP) USING A LINEARLY-MOVING HEATING ASSEMBLY WITH AN AXISYMMETRIC AND RADIALLY-TUNABLE THERMAL RADIATION PROFILE
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Assignee
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| 55 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915-1053 |
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Correspondence name and address
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ESCHWEILER & ASSOCIATES LLC
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THOMAS G. ESCHWEILER
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629 EUCLID AVENUE, SUITE 1210
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CLEVELAND, OH 44114
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