Patent Assignment Details
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| Reel/Frame: | 013406/0576 | |
| Pages: | 3 |
| | Recorded: | 10/17/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10271793
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Filing Dt:
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10/17/2002
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Publication #:
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Pub Dt:
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04/17/2003
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Title:
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Polishing platen of chemical mechanical polishing apparatus and planarization method using the same
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Assignee
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| SAN 136-1, AMI-RI, BUBAL-EUB, ICHON-SHI |
| KYOUNGKI-DO, KOREA, REPUBLIC OF |
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Correspondence name and address
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BIRCH, STEWART, KOLASCH & BIRCH, LLP
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JAMES T. ELLER, JR.
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P.O. BOX 747
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FALLS CHURCH, VA 22040-0747
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