Patent Assignment Details
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| Reel/Frame: | 013441/0289 | |
| Pages: | 3 |
| | Recorded: | 10/29/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10282388
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Filing Dt:
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10/29/2002
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Publication #:
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Pub Dt:
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04/29/2004
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Title:
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Deposition of barrier metal in damascene interconnects using metal carbonyl
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Assignee
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| 60 WOODLANDS INDUSTRIAL PARK D |
| STREET 2 |
| SINGAPORE 738406, SINGAPORE |
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Correspondence name and address
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GEORGE O. SAILE
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28 DAVIS AVENUE
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POUGHKEEPSIE, NEW YORK 12603
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