Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 013473/0161 | |
| Pages: | 3 |
| | Recorded: | 11/05/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/04/2005
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Application #:
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10288890
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Filing Dt:
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11/05/2002
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Publication #:
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Pub Dt:
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04/03/2003
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Title:
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PLASMA REACTOR WITH OVERHEAD RF ELECTRODE TUNED TO THE PLASMA
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Assignee
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| P.O. BOX 450-A |
| PATENT COUNSEL, M/S 2061 |
| SANTA CLARA, CALIFORNIA 95035 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT W. MULCAHY
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P.O. BOX 450-A
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PATENT COUNSEL, M/S 2061
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SANTA CLARA, CA 95035
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