Patent Assignment Details
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| Reel/Frame: | 013479/0382 | |
| Pages: | 4 |
| | Recorded: | 11/04/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10215222
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Filing Dt:
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08/07/2002
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Publication #:
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Pub Dt:
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03/20/2003
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Title:
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RADIATION-GENERATING DEVICES UTILIZING MULTIPLE PLASMA-DISCHARGE SOURCES AND MICROLITHOGRAPHY APPARATUS AND METHODS UTILIZING THE SAME
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Assignee
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| 2-3 MARUNOUCHI 3-CHOME CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN LLP
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DONALD L. STEPHENS, JR.
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ONE WORLD TRADE CENTER, SUITE 1600
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121 S.W. SALMON STREET
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PORTLAND, OREGON 97204-2988
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