Patent Assignment Details
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| Reel/Frame: | 013487/0737 | |
| Pages: | 2 |
| | Recorded: | 11/12/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10291615
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Filing Dt:
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11/12/2002
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Publication #:
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Pub Dt:
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05/15/2003
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Title:
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Focusing method, position-measuring method, exposure method, method for producing device, and exposure apparatus
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Assignee
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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Correspondence name and address
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OLIFF & BERRIDGE, PLC
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MARIO A. COSTANTINO
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P.O. BOX 19928
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ALEXANDRIA, VA 22320
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