Patent Assignment Details
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| Reel/Frame: | 013494/0342 | |
| Pages: | 3 |
| | Recorded: | 03/19/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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10356970
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Filing Dt:
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02/03/2003
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Publication #:
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Pub Dt:
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08/05/2004
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Title:
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METHOD OF POLISHING A SILICON-CONTAINING DIELECTRIC
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Assignee
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| 870 NORTH COMMONS DRIVE |
| AURORA, ILLINOIS 60504 |
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Correspondence name and address
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CABOT MICROELECTRONICS CORPORATION
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PHYLLIS T. TURNER-BRIM, ESQ.
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ASSOCIATE GENERAL COUNSE, INTEL PROP.
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870 NORTH COMMONS DRIVE
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AURORA, ILLINOIS 60504
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