Patent Assignment Details
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| Reel/Frame: | 013512/0201 | |
| Pages: | 6 |
| | Recorded: | 11/19/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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10299434
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Filing Dt:
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11/19/2002
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Title:
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METHOD FOR DEFECT REDUCTION AND ENHANCED CONTROL OVER CRITICAL DIMENSIONS AND PROFILES IN SEMICONDUCTOR DEVICES
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Assignee
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| 1160 KERN AVENUE |
| SUNNYVALE, CALIFORNIA 94086-3453 |
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Correspondence name and address
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FOLEY & LARDNER
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DAVID A. BLUMENTHAL
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2029 CENTURY PARK EAST
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SUITE 3500
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LOS ANGELES, CA 90067-3021
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