Patent Assignment Details
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| Reel/Frame: | 013526/0546 | |
| Pages: | 5 |
| | Recorded: | 11/25/2002 | | |
| Conveyance: | CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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10214754
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Filing Dt:
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08/09/2002
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Publication #:
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Pub Dt:
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12/26/2002
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Title:
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METHOD FOR ETCHING ORGANIC FILM, METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND PATTERN FORMATION METHOD
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Assignee
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| 2500, HAGISONO, CHIGASAKI-SHI |
| KANAGAWA, JAPAN 253-8543 |
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Correspondence name and address
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NIXON PEABODY LLP
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DONALD R. STUDEBAKER
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8180 GREENSBORO DRIVE
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SUITE 800
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MCLEAN, VA 22102
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