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Patent Assignment Details
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Reel/Frame:013538/0707   Pages: 4
Recorded: 11/29/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
10305951
Filing Dt:
11/29/2002
Publication #:
Pub Dt:
06/05/2003
Title:
Plasma processing apparatus and processing method
Assignors
1
Exec Dt:
11/15/2002
2
Exec Dt:
11/15/2002
3
Exec Dt:
11/15/2002
4
Exec Dt:
11/08/2002
5
Exec Dt:
11/15/2002
6
Exec Dt:
11/15/2002
7
Exec Dt:
11/15/2002
Assignee
1
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO 107-8481, JAPAN
Correspondence name and address
OBLON SPIVAK ET AL
1755 J. DAVIS HWY
4TH FL.
ARLINGTON VA 22202

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