Patent Assignment Details
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| Reel/Frame: | 013568/0039 | |
| Pages: | 3 |
| | Recorded: | 12/12/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/23/2007
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Application #:
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10259757
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Filing Dt:
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09/30/2002
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Publication #:
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Pub Dt:
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04/01/2004
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Title:
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METHOD AND APPARATUS FOR AN IMPROVED UPPER ELECTRODE PLATE IN A PLASMA PROCESSING SYSTEM
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Assignee
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| TBS BROADCAST CENTER |
| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER, ET AL
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MICHAEL R. CASEY, PH.D.
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1940 DUKE STREET
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ALEXANDRIA, VIRGINIA 22314
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