Patent Assignment Details
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| Reel/Frame: | 013575/0745 | |
| Pages: | 3 |
| | Recorded: | 12/16/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10247081
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Filing Dt:
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09/19/2002
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Publication #:
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Pub Dt:
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04/10/2003
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Title:
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Film deposition method and film deposition system for depositing a halogen compound film, and magnesium fluoride film
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Assignees
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| 1-1, SHINMAEIWA-CHO |
| TAKARAZUKA-SHI |
| HYOGO 665-8550, JAPAN |
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| 6, KANDA SURUGADAI 4-CHOME |
| CHIYODA-KU |
| KOKYO 101-8010, JAPAN |
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Correspondence name and address
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MARSHALL, GERSTEIN & BORUN
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RICHARD H. ANDERSON
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233 S. WACKER DRIVE, SUITE 6300
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SEARS TOWER
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CHICAGO, IL 60606-6357
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