Patent Assignment Details
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| Reel/Frame: | 013579/0679 | |
| Pages: | 2 |
| | Recorded: | 12/13/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10318627
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Filing Dt:
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12/13/2002
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Publication #:
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Pub Dt:
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06/19/2003
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Title:
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Diaphragm valve, substrate processing unit and substrate processing apparatus
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Assignee
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| 1-1 TENJINKITAMACHI TERANOUCHI-AGARU 4-CHOME |
| HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN |
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Correspondence name and address
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OSTROLENK, FABER, GERB ET AL
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ROBERT C. FABER
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1180 AVENUE OF THE AMERICAS
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NEW YORK, NY 10035-8403
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