Patent Assignment Details
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Reel/Frame: | 013647/0042 | |
| Pages: | 3 |
| | Recorded: | 05/12/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/16/2003
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Application #:
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10159169
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Filing Dt:
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05/31/2002
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Title:
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SUPPORT LINER FOR ISOLATION TRENCH HEIGHT CONTROL IN VERTICAL DRAM PROCESSING
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Assignee
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ST. MARTIN-STR. 53 |
81541 MUNICH, GERMANY |
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Correspondence name and address
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SIEMENS CORPORATION
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ELSA KELLER
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INTELLECTUAL PROPERTY DEPARTMENT
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186 WOOD AVENUE SOUTH
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ISELIN, NJ 08830
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