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Patent Assignment Details
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Reel/Frame:013693/0032   Pages: 3
Recorded: 01/27/2003
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
10331360
Filing Dt:
12/30/2002
Publication #:
Pub Dt:
09/04/2003
Title:
CMP slurry for metal and method for manufacturing metal line contact plug of semiconductor device using the same
Assignors
1
Exec Dt:
12/10/2002
2
Exec Dt:
12/10/2002
3
Exec Dt:
12/10/2002
4
Exec Dt:
12/10/2002
Assignee
1
SAN 136-1, AMI-RI, BUBAL-EUB, ICHON-SHI
KYOUNGKI-DO, KOREA, REPUBLIC OF 467-860
Correspondence name and address
MARSHALL, GERSTEIN & BORUN
MICHAEL R. HULL
233 S. WACKER DRIVE, SUITE 6300
SEARS TOWER
CHICAGO, ILLINOIS 60606-6357

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