Patent Assignment Details
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Reel/Frame: | 013697/0225 | |
| Pages: | 3 |
| | Recorded: | 01/23/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/27/2007
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Application #:
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10349092
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Filing Dt:
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01/23/2003
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Publication #:
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Pub Dt:
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08/14/2003
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Title:
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PROCESS FOR CHEMICAL MECHANICAL POLISHING OF SEMICONDUCTOR SUBSTRATE AND AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING
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Assignee
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11-24, TSUKIJI 2-CHOME |
CHUO-KU, TOKYO 104-8410, JAPAN |
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Correspondence name and address
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OBLON SPIVAK ET AL
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1940 DUKE ST
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ALEXANDRIA VA 22314
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