Patent Assignment Details
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| Reel/Frame: | 013704/0856 | |
| Pages: | 3 |
| | Recorded: | 01/24/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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10351032
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Filing Dt:
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01/24/2003
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Title:
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SINGLE-TUBE INTERLACED INDUCTIVELY COUPLING PLASMA SOURCE
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Assignee
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| 4000 N. FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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SILICON VALLEY PATENT GROUP LLP
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DAVID E. STEUBER
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2350 MISSION COLLEGE BLVD., SUITE 360
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SANTA CLARA, CA 95054
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