Patent Assignment Details
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| Reel/Frame: | 013704/0899 | |
| Pages: | 2 |
| | Recorded: | 01/30/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/28/2005
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Application #:
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10263132
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Filing Dt:
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10/02/2002
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Publication #:
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Pub Dt:
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04/08/2004
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Title:
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METHOD OF MEASURING ION BEAM ANGLES
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Assignee
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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Correspondence name and address
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VARIAN SEMICONDUCTOR EQUIPMENT
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ASSOCIATES, INC.
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MARK A. SUPERKO, ESQ.
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35 DORY RD.
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GLOUCESTER, MA 01930-2297
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