Patent Assignment Details
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| Reel/Frame: | 013722/0166 | |
| Pages: | 3 |
| | Recorded: | 01/28/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/21/2004
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Application #:
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10353760
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Filing Dt:
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01/28/2003
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Publication #:
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Pub Dt:
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07/31/2003
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Title:
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PLASMA PROCESSING APPARATUS AND METHOD CAPABLE OF PERFORMING UNIFORM PLASMA TREATMENT BY CONTROL OF EXCITATION POWER
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Assignees
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| 1-7 YUKIGAYA, OTSUKA-CHO |
| OTA-KU, TOKYO, JAPAN |
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| 2-1-17-301 KOMEGAFUKURO |
| AOBA-KU, SENDAI-SHI |
| MIYAGI-KEN, JAPAN |
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Correspondence name and address
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BEYER WEAVER & THOMAS, LLP
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STEVE D BEYER
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P.O. BOX 778
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BERKELEY, CA 94704-0778
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