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Patent Assignment Details
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Reel/Frame:013733/0448   Pages: 3
Recorded: 02/04/2003
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
05/17/2005
Application #:
10357899
Filing Dt:
02/04/2003
Publication #:
Pub Dt:
08/07/2003
Title:
ARRANGEMENT FOR MONITORING THE ENERGY RADIATED BY AN EUV RADIATION SOURCE
Assignors
1
Exec Dt:
01/23/2003
2
Exec Dt:
01/23/2003
Assignee
1
GOESCHWITZER STRASSE 25
JENA, GERMANY D-07745
Correspondence name and address
RED SMITH LLP
GERALD H. KIEL
599 LEXINGTON
NEW YORK, NY 10022

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