Patent Assignment Details
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Reel/Frame: | 013733/0448 | |
| Pages: | 3 |
| | Recorded: | 02/04/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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10357899
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Filing Dt:
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02/04/2003
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Publication #:
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Pub Dt:
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08/07/2003
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Title:
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ARRANGEMENT FOR MONITORING THE ENERGY RADIATED BY AN EUV RADIATION SOURCE
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Assignee
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GOESCHWITZER STRASSE 25 |
JENA, GERMANY D-07745 |
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Correspondence name and address
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RED SMITH LLP
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GERALD H. KIEL
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599 LEXINGTON
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NEW YORK, NY 10022
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