Patent Assignment Details
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| Reel/Frame: | 013734/0857 | |
| Pages: | 2 |
| | Recorded: | 02/05/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/04/2006
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Application #:
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10256454
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Filing Dt:
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09/27/2002
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Publication #:
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Pub Dt:
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04/01/2004
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Title:
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METHOD FOR THE MANUFACTURE OF PHASE SHIFTING MASKS FOR EUV LITHOGRAPHY
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Assignee
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| C/O INTEL CORPORATION |
| 3065 BOWERS AVE., SCI-2-B1 |
| SANTA CLARA, CALIFORNIA 95052-8119 |
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Correspondence name and address
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LAWRENCE LIVERMORE NAT. LABORATORY
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ALAN H. THOMPSON
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PATENT GROUP, L-703
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BOX 808, L-703
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LIVERMORE, CA 94551
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