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Total properties:
23
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Patent #:
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Issue Dt:
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08/26/2003
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Application #:
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10083667
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Filing Dt:
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02/27/2002
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Publication #:
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Pub Dt:
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09/05/2002
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Title:
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METHOD AND SYSTEM FOR DUAL RETICLE IMAGE EXPOSURE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10091581
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Filing Dt:
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03/07/2002
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Publication #:
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Pub Dt:
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07/11/2002
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Title:
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Apparatus, system, and method for active compensation of aberrations in an optical system
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Patent #:
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Issue Dt:
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05/03/2005
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Application #:
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10127505
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Filing Dt:
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04/23/2002
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Publication #:
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Pub Dt:
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10/23/2003
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Title:
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SYSTEM AND METHOD FOR IMPROVING LINEWIDTH CONTROL IN A LITHOGRAPHY DEVICE BY VARYING THE ANGULAR DISTRIBUTION OF LIGHT IN AN ILLUMINATOR AS A FUNCTION OF FIELD POSITION
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Patent #:
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Issue Dt:
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08/31/2004
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Application #:
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10127506
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Filing Dt:
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04/23/2002
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Publication #:
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Pub Dt:
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10/23/2003
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Title:
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SYSTEM AND METHOD FOR IMPROVING LINE WIDTH CONTROL IN A LITHOGRAPHY DEVICE USING AN ILLUMINATION SYSTEM HAVING PRE-NUMERICAL APERTURE CONTROL
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Patent #:
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Issue Dt:
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04/03/2007
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Application #:
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10131185
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Filing Dt:
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04/25/2002
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Publication #:
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Pub Dt:
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10/31/2002
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Title:
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METHODS FOR OPTICAL BEAM SHAPING AND DIFFUSING
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Patent #:
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Issue Dt:
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05/25/2004
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Application #:
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10138714
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Filing Dt:
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05/06/2002
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Publication #:
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Pub Dt:
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12/19/2002
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Title:
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METHOD FOR DETERMINING REFRACTIVE INDEX DISTRIBUTION
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Patent #:
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Issue Dt:
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06/29/2004
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Application #:
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10156005
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Filing Dt:
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05/29/2002
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Publication #:
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Pub Dt:
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12/04/2003
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Title:
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CATADIOPTRIC LITHOGRAPHY SYSTEM AND METHOD WITH RETICLE STAGE ORTHOGONAL TO WAFER STAGE
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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10166062
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Filing Dt:
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06/11/2002
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Publication #:
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Pub Dt:
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12/11/2003
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Title:
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ADVANCED ILLUMINATION SYSTEM FOR USE IN MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
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02/07/2006
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Application #:
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10170546
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Filing Dt:
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06/14/2002
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Publication #:
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Pub Dt:
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12/18/2003
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Title:
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METHOD AND APPARATUS FOR MANAGING ACTINIC INTENSITY TRANSIENTS IN A LITHOGRAPHY MIRROR
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Patent #:
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Issue Dt:
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10/05/2004
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Application #:
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10208046
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Filing Dt:
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07/31/2002
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Publication #:
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Pub Dt:
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02/05/2004
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Title:
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SYSTEM AND METHOD FOR LASER BEAM EXPANSION WITHOUT EXPANDING SPATIAL COHERENCE
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Patent #:
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Issue Dt:
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01/31/2006
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Application #:
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10216660
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Filing Dt:
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08/12/2002
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Publication #:
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Pub Dt:
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05/01/2003
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Title:
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SYSTEM AND METHOD FOR RETICLE PROTECTION AND TRANSPORT
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Patent #:
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Issue Dt:
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01/08/2008
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Application #:
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10224485
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Filing Dt:
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08/21/2002
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Publication #:
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Pub Dt:
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02/27/2003
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Title:
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HIGH NUMERICAL APERTURE PROJECTION SYSTEM AND METHOD FOR MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
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11/30/2004
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Application #:
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10225343
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Filing Dt:
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08/22/2002
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Publication #:
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Pub Dt:
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01/29/2004
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Title:
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LITHOGRAPHY TOOL HAVING A VACUUM RETICLE LIBRARY COUPLED TO A VACUUM CHAMBER
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Patent #:
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Issue Dt:
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08/23/2005
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Application #:
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10235499
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Filing Dt:
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09/06/2002
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Publication #:
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Pub Dt:
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03/11/2004
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Title:
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RETICLE FOCUS MEASUREMENT METHOD USING MULTIPLE INTERFEROMETRIC BEAMS
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Patent #:
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|
Issue Dt:
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07/25/2006
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Application #:
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10253655
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Filing Dt:
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09/25/2002
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Publication #:
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Pub Dt:
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03/25/2004
| | | | |
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Title:
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METHOD FOR PROTECTION OF ADHESIVES USED TO SECURE OPTICS FROM ULTRA-VIOLET LIGHT
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Patent #:
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|
Issue Dt:
|
11/30/2004
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Application #:
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10260308
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Filing Dt:
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10/01/2002
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Publication #:
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Pub Dt:
|
04/01/2004
| | | | |
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Title:
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METHOD OF MAKING A CUBE
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Patent #:
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|
Issue Dt:
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08/10/2004
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Application #:
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10270556
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Filing Dt:
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10/16/2002
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Publication #:
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Pub Dt:
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04/24/2003
| | | | |
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Title:
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ADVANCED ILLUMINATION SYSTEM FOR USE IN MICROLITHOGRAPHY
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|
|
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Patent #:
|
|
Issue Dt:
|
11/16/2004
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Application #:
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10270561
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Filing Dt:
|
10/16/2002
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|
Publication #:
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Pub Dt:
|
06/26/2003
| | | | |
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Title:
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SYSTEM AND METHOD FOR LASER BEAM EXPANSION
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|
|
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Patent #:
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|
Issue Dt:
|
01/18/2005
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Application #:
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10299855
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Filing Dt:
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11/20/2002
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Publication #:
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Pub Dt:
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05/20/2004
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Title:
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METHOD, SYSTEM, AND COMPUTER PROGRAM PRODUCT FOR IMPROVED TRAJECTORY PLANNING AND EXECUTION
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|
|
|
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Patent #:
|
|
Issue Dt:
|
08/03/2004
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Application #:
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10300898
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Filing Dt:
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11/21/2002
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Publication #:
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Pub Dt:
|
05/27/2004
| | | | |
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Title:
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METHOD AND APPARATUS FOR ISOLATING LIGHT SOURCE GAS FROM MAIN CHAMBER GAS IN A LITHOGRAPHY TOOL
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/26/2005
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Application #:
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10301627
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Filing Dt:
|
11/22/2002
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|
Publication #:
|
|
Pub Dt:
|
01/01/2004
| | | | |
|
Title:
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SYSTEM AND METHOD FOR AUTOMATED FOCUS MEASURING OF A LITHOGRAPHY TOOL
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/26/2006
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Application #:
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10304995
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Filing Dt:
|
11/27/2002
|
|
Publication #:
|
|
Pub Dt:
|
02/05/2004
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR CORRECTION OF INTRINSIC BIREFRINGENCE IN UV MICROLITHOGRAPHY
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|
|
|
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Patent #:
|
|
Issue Dt:
|
05/04/2004
|
Application #:
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10307407
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Filing Dt:
|
12/02/2002
|
|
Title:
|
BEAM-SPLITTER OPTICS DESIGN THAT MAINTAINS AN UNFLIPPED (UNMIRRORED) IMAGE FOR A CATADIOPTRIC LITHOGRAPHIC SYSTEM
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