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Total properties:
17
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Patent #:
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Issue Dt:
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05/02/2006
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Application #:
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10136188
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Filing Dt:
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05/01/2002
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Publication #:
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Pub Dt:
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11/06/2003
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Title:
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METHODS OF MANUFACTURING A LITHOGRAPHY TEMPLATE
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Patent #:
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Issue Dt:
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08/09/2005
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Application #:
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10191749
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Filing Dt:
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07/09/2002
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Publication #:
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Pub Dt:
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01/15/2004
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Title:
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SYSTEM AND METHOD FOR DISPENSING LIQUIDS
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Patent #:
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Issue Dt:
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06/21/2005
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Application #:
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10194410
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Filing Dt:
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07/11/2002
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Publication #:
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Pub Dt:
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01/15/2004
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Title:
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METHOD FOR IMPRINT LITHOGRAPHY USING AN ELECTRIC FIELD
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Patent #:
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Issue Dt:
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08/23/2005
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Application #:
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10194411
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Filing Dt:
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07/11/2002
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Publication #:
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Pub Dt:
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01/15/2004
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Title:
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FORMATION OF DISCONTINUOUS FILMS DURING AN IMPRINT LITHOGRAPHY PROCESS
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Patent #:
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Issue Dt:
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05/31/2005
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Application #:
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10194414
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Filing Dt:
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07/11/2002
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Publication #:
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Pub Dt:
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01/15/2004
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Title:
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STEP AND REPEAT IMPRINT LITHOGRAPHY SYSTEMS
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Patent #:
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Issue Dt:
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07/18/2006
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Application #:
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10194991
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Filing Dt:
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07/11/2002
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Publication #:
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Pub Dt:
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07/01/2004
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Title:
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STEP AND REPEAT IMPRINT LITHOGRAPHY PROCESSES
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Patent #:
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Issue Dt:
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07/12/2005
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Application #:
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10210780
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Filing Dt:
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08/01/2002
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Publication #:
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Pub Dt:
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02/05/2004
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Title:
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ALIGNMENT METHODS FOR IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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04/11/2006
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Application #:
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10210785
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Filing Dt:
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08/01/2002
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Publication #:
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Pub Dt:
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02/05/2004
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Title:
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SCATTEROMETRY ALIGNMENT FOR IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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10210894
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Filing Dt:
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08/01/2002
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Publication #:
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Pub Dt:
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02/05/2004
| | | | |
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Title:
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ALIGNMENT SYSTEMS FOR IMPRINT LITHOGRAPHY
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Patent #:
|
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Issue Dt:
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07/04/2006
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Application #:
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10227105
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Filing Dt:
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08/23/2002
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Publication #:
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Pub Dt:
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02/26/2004
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Title:
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METHOD FOR FABRICATING BULBOUS-SHAPED VIAS
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10235314
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Filing Dt:
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09/05/2002
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Publication #:
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Pub Dt:
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03/11/2004
| | | | |
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Title:
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FUNCTIONAL PATTERNING MATERIAL FOR IMPRINT LITHOGRAPHY PROCESSES
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Patent #:
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NONE
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Issue Dt:
|
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Application #:
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10264926
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Filing Dt:
|
10/04/2002
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Publication #:
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Pub Dt:
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04/08/2004
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Title:
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Method of forming a layer on a substrate to facilitate fabrication of metrology standards
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Patent #:
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|
Issue Dt:
|
01/08/2013
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Application #:
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10264960
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Filing Dt:
|
10/04/2002
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Publication #:
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Pub Dt:
|
04/08/2004
| | | | |
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Title:
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METHOD TO ARRANGE FEATURES ON A SUBSTRATE TO REPLICATE FEATURES HAVING MINIMAL DIMENSIONAL VARIABILITY
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|
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Patent #:
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|
Issue Dt:
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08/16/2005
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Application #:
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10293223
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Filing Dt:
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11/13/2002
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Publication #:
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Pub Dt:
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05/13/2004
| | | | |
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Title:
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METHOD OF REDUCING PATTERN DISTORTIONS DURING IMPRINT LITHOGRAPHY PROCESSES
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|
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Patent #:
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|
Issue Dt:
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03/28/2006
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Application #:
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10293224
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Filing Dt:
|
11/13/2002
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Publication #:
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Pub Dt:
|
05/13/2004
| | | | |
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Title:
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CHUCKING SYSTEM FOR MODULATING SHAPES OF SUBSTRATES
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|
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Patent #:
|
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Issue Dt:
|
11/07/2006
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Application #:
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10293919
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Filing Dt:
|
11/13/2002
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|
Publication #:
|
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Pub Dt:
|
11/06/2003
| | | | |
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Title:
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METHODS OF INSPECTING A LITHOGRAPHY TEMPLATE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
03/29/2005
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Application #:
|
10318365
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Filing Dt:
|
12/12/2002
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|
Publication #:
|
|
Pub Dt:
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06/17/2004
| | | | |
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Title:
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METHOD FOR DETERMINING CHARACTERISTICS OF SUBSTRATE EMPLOYING FLUID GEOMETRIES
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