Patent Assignment Details
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| Reel/Frame: | 013767/0353 | |
| Pages: | 4 |
| | Recorded: | 02/05/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09697071
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Filing Dt:
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10/26/2000
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Title:
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High numerical aperture ring field projection system for extreme ultraviolet lithography
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Assignee
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| C/O INTEL CORPORATION |
| SC1-2-B1, 3065 BOWERS AVE. |
| SANTA CLARA, CALIFORNIA 95052-8119 |
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Correspondence name and address
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ALAN H. THOMPSON
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LAWRENCE LIVERMORE NAT. LABORTORY
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PATENT GROUP, L-703
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BOX 808
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LIVERMORE, CA 94551
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