Patent Assignment Details
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| Reel/Frame: | 013769/0381 | |
| Pages: | 4 |
| | Recorded: | 06/30/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/09/2004
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Application #:
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09669958
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Filing Dt:
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09/26/2000
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Title:
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COMPENSATION OF FLARE-INDUCED CD CHANGES IN EUVL
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Assignee
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| 3065 BOWERS AVE., SC1-2-B1 |
| C/O INTEL CORPORATION |
| SANTA CLARA, CALIFORNIA 95052-8119 |
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Correspondence name and address
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LAWRENCE LIVERMORE NAT. LABORATORY
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ALAN H. THOMPSON
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PATENT GROUP, L-703
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BOX 808, L-703
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LIVERMORE, CA 94551
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