Patent Assignment Details
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| Reel/Frame: | 013769/0467 | |
| Pages: | 5 |
| | Recorded: | 02/13/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10366206
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Filing Dt:
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02/13/2003
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Publication #:
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Pub Dt:
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08/19/2004
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Title:
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IN-SITU DISCHARGE TO AVOID ARCING DURING PLASMA ETCH PROCESSES
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Assignee
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| 121 PARK AVE. 3 |
| SCIENCE -BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN R.O.C. |
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Correspondence name and address
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GEORGE O. SAILE
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28 DAVIS AVENUE
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POUGHKEEPSIE, NY 12603
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