Patent Assignment Details
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| Reel/Frame: | 013818/0281 | |
| Pages: | 2 |
| | Recorded: | 02/27/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10373684
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Filing Dt:
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02/27/2003
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Publication #:
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Pub Dt:
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08/28/2003
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Title:
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METHOD AND APPARATUS FOR CLEANING AND DRYING SEMICONDUCTOR WAFER
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Assignee
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| 537-17 SEGYO-DONG, PYUNGTAEK-CITY |
| KYUNGKI-DO, KOREA, REPUBLIC OF |
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Correspondence name and address
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ROTHWELL, FIGG, ERNST & MANBECK
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G. FRANKLIN ROTHWELL
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1425 K ST., N.W.
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SUITE 800
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WASHINGTON, D.C. 20005
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