Patent Assignment Details
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| Reel/Frame: | 013841/0616 | |
| Pages: | 4 |
| | Recorded: | 02/25/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10374533
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Filing Dt:
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02/25/2003
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Publication #:
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Pub Dt:
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08/21/2003
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Title:
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Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps using RF power
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Assignee
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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SCOTT W. HEWETT
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P.O. BOX 450A, M/S 2061
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LEGAL AFFAIRS DEPARTMENT
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SANTA CLARA, CA 95052
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