Patent Assignment Details
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| Reel/Frame: | 013844/0051 | |
| Pages: | 2 |
| | Recorded: | 03/04/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10377825
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Filing Dt:
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03/04/2003
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Publication #:
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Pub Dt:
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09/09/2004
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Title:
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Plasma processing apparatus and method for manufacturing electrostatic chuck
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Assignee
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| 1-24-14, NISHI SHIMBASHI |
| MINATO-KU |
| TOKYO 105-8717, JAPAN |
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Correspondence name and address
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ANTONELLI, TERRY, STOUT ET AL.
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WILLIAM I. SOLOMON
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1300 NORTH SEVENTEENTH STREET
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SUITE 1800
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ARLINGTON, VA 22209
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