Patent Assignment Details
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Reel/Frame: | 013865/0308 | |
| Pages: | 2 |
| | Recorded: | 03/07/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10383410
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Filing Dt:
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03/07/2003
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Title:
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AN ALIGNMENT STRUCTURE AND METHOD FOR MATING A WAFER DELIVERY DEVICE TO A WAFER TREATMENT TOOL
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Assignee
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55 CHERRY HILL DRIVE |
BEVERLY, MASSACHUSETTS 01915-1053 |
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Correspondence name and address
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WATTS, HOFFMAN, FISHER, ET AL.
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STEPHEN J. SCHULTZ
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1100 SUPERIOR AVENUE, STE. 1750
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CLEVELAND, OH 44114-2518
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